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Edwards STP301 / C磁懸浮分子泵

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產品名稱: Edwards STP301 / C磁懸浮分子泵
產品型號: B74830020
產品展商: Edwards
產品文檔: 無相關文檔

簡單介紹


Edwards STP301 / C磁懸浮分子泵  的詳細介紹

Edwards STP301 / C Turbomolecular Vacuum Pump - NEW

Edwards STP301 is for use in electron microscopes and semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. The STP301 has been approved for use by major equipment manufacturers in the scientific instrument, semiconductor and magnetic media industries.

This STP pump is supplied with an inlet screen.

Advanced Rotor Technology

  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller
Inlet flange VG-100 / ISO-100 / ICF-152
Outlet port KF-25
Pumping speed
    N2 300 l/s
    H2 300 l/s
Compression ratio
    N2 > 108
    H2 > 2 x 104
Ultimate pressure w/ bake out heating     6.5 x 10-6 Pa (5 x 10-8 Torr)
Max. allowable inlet pressure 0.066 Pa
Max continuous outlet pressure 13 Pa
Rated speed 48,000 rpm
Starting time 3 min
Max inlet flange temperature 120°C
Input voltage 100 to 120
Power consumption 0.55 kVA
Weight 11 kg
Edwards STP301 / C Turbomolecular Vacuum Pump - NEW

P/N B748-30-020 / B74830020  STP301  ISO-100
P/N B748-31-010 / B74831010  STP301  DN 100 CF
P/N B748-71-010 / B74871010  STP301C  ISO-100
    B748-81-010 / B74881010  STP301C  DN 100 CF

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