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產(chǎn)品名稱(chēng): Edwards STPH 301C渦輪分子泵
產(chǎn)品型號(hào): B71901010
產(chǎn)品展商: Edwards
產(chǎn)品文檔: 無(wú)相關(guān)文檔
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Edwards STPH 301C渦輪分子泵
的詳細(xì)介紹
Edwards STPH 301C Turbomolecular Vacuum Pump - NEW
Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
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Higher gas throughput
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Maximized process flexibility
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Oil free
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Low vibration
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High reliability
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Maintenance free
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Harsh process compatible
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Increased life
Advanced Controller Design
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Auto tuning
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Self diagnostic functions
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DC motor drive
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Battery-free operation
Compact Design
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Small footprint
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Half rack controller
5 Axis Magnetic Suspension System
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Zero contamination
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Low maintenance
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Any orientation operation
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Inlet flange
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ISO-100K
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Outlet port
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KF-40
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Purge port
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KF-10
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Water cooling fitting
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PT1/4
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Pumping speed
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N2
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300 l/s
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H2
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200 l/s
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Compression ratio
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N2
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> 108
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H2
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103
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Ultimate pressure w/ bake out heating
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10-7 Pa (10-9 Torr)
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Max. continuous outlet pressure
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665 Pa (5 Torr)
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Max. nitrogen throughput
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2,500 sccm
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Rated speed
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48,000 rpm
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Starting time
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4 min
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Max inlet flange temperature
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120°C
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Input voltage
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100 to 120
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Power consumption
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0.6 kVA
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Weight
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15 kg
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Edwards STPH301C Turbomolecular Vacuum Pump - NEW
P/N B719-01-010 / B71901010 STPH301C ISO-100K
P/N YT34-0Z-004 / YT340Z004 STPH301C DN 100 CF
P/N YT34-16-001 / YT3416001 STPH301CV ISO-100F TMS
