Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

Edwards STP603 is a new turbomolecular pump for use in the most advanced semiconductor applications. Edwards rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Compact Design

• Small footprint
• Half rack controller

Edwards STP603 / C Turbomolecular Vacuum Pump - NEW

P/N YT39-B0-030 / YT39B0030  STP603  ISO-160F
P/N YT39-0Z-005 / YT390Z005  STP603  DN 160 CF
P/N YT39-AZ-002 / YT39AZ002  STP603C  DN 160 CF
    YT39-AZ-000 / YT39AZ000  STP603C  VG-150